Optical lighting system

ABSTRACT

An optical lighting system comprising either an optical system or an optical mirror system. In the optical lens and optical mirror systems, the light incident and exiting planes of the lenses and mirrors, are formed to satisfy given equations. Accordingly, in a contact or proximity exposure system, it is possible to unify irradiance on a surface to be irradiated and reduce the optical path length, thus reducing the overall device size. In a projection system, it is possible to unify irradiance on an image surface while efficiently utilizing light by ommitting a gradient filter.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to an optical lighting system which can beused as an original irradiator in a proximity exposure device forprinting circuit patterns of a printed-wiring board; an integratedcircuit, and the like, onto a substrate. The present invention is alsouseful in a contact printer and a process camera for printing the imageof an original process film onto a machine plate, and the like. Moreparticularly, the present invention relates to an optical lightingsystem which can uniformly irradiate the total area of a surface to beirradiated in a proximity exposure device and a contact printer(hereinafter these are simply referred to as a contact or proximityexposure system), or can perform irradiation such that the irradiance ofan image surface is uniform in a process camera and the like(hereinafter simply referred to as a projection system).

2. Description of the Prior Art

FIG. 1 illustrates a conventional optical lighting system of a contactor proximately exposure system according to "OPTICAL ENGINEERINGHANDBOOK" published by ASAKURA SHOTEN in February, 1986, p. 682. FIG. 2illustrates a conventional optical lighting system of a projectionsystem.

Referring to FIG. 1, the conventional optical lighting system of acontact or proximity exposure system basically comprises a light sourceLS; a so-called fly's eye lens OS located in the vicinity of the secondfocal point of an elliptical mirror EM (for conveging light emitted fromthe light source LS); and a collimator lens CL located between the fly'seye lens OS and a surface P to be irradiated. The fly's eye lens OS iswhich is a lens which is formed by arranging a plurality of elementlenses on a plane perpendicular to the optical axis of the elementlenses. Reflection mirrors M₂ and M₃ act to change the advancingdirection of the light. The real image of an exit pupil of theelliptical mirror EM is formed in the vicinity of the front focal pointof the collimator lens CL through the fly's eye lens OS. The real imageof an exit pupil of the fly's eye lens OS is formed on the surface P tobe irradiated through the collimator lens CL. According to this opticallighting system, even if a small gap between an original pattern OG,placed on the surface P to be irradiated, and a photosensitive materialPM occurs, gradation or misregistration of a printed pattern image canbe prevented, since printing is performed by parallel light.Furthermore, irradiance is increased as high as possible by forming thereal image of the exit pupil of the fly's eye lens OS, which issecondary light source, on the surface P to be irradiated. Stillfurther, irradiance distribution is unified by correcting the nonuniformquantity of light caused at the second focal point of the ellipticalmirror EM, through the fly's eye lens OS. The collimator lens CL havinga long focal length is used since it is necessary to unify irradiancedistribution on the surface P to be irradiated.

Referring to FIG. 2, the conventional optical lighting system of aprojection system comprises: a number of light source lamps 11 arrangedin a light source box 10; a light diffusion plate 12 located in front ofthe light source box 10: and a gradient filter GF located between thelight diffusion plate 12 and an original OG. The gradient filter GF isconstructed such that the transmittance of light therethrough becomeslower as it approaches the center. The original OG is irradiated throughthe gradient filter GF so that irradiance in the peripheral portion ofthe original's surface (i.e., a surface P to be irradiated) becomeshigher, whereby irradiance on an image surface P' is unified. Namely,lowering of irradiance in the peripheral portion of the image surfaceP', which is caused by a projection lens IL in accordance with the "cos⁴θ law", is corrected by the gradient filter GF.

In the conventional optical lighting system as hereinbefore described,an area of uniform irradiance on the surface P decreases when theoptical path length is reduced to decrease the overall size of thedevice. Therefore, it is necessary to lengthen the optical path lengthin order to enlarge the area of uniform illuminance. Concommitantly, theoverall size of the device is increased.

On the other hand, in the conventional projection optical lightingsystem as hereinbefore described, the quantity of light utilized isinefficient since the gradient filter GF is interposed in the opticalpath and is needed to unify the irradiance of the image surface

SUMMARY OF THE INVENTION

According to a first aspect of the invention, an optical lighting systemis provided which comprises an optical lens system including a lenswhich has an incident light plane, an exiting light plane and an opticalaxis, the system being placed between a light source and a surface to beirradiated. Irradiance at a irradiation height H on the surface to beirradiated is defined as S(H), and a relationship between an angle θ,which a ray proceeding from the light source to the incident light planeof the lens optical system makes with the optical axis, and theirradiation height H is defined as the following equation (1):

    ∫S(H)HdH=∫J(θ) sin θdθ         (1)

Thus, an angle α₁, which the plane of incidence at a given incidentheight of the lens optical system makes with the optical axis is definedby the following equation (2):

    tan α.sub.1 =(-n cos θ.sub.1 +cos θ)/(n sin θ.sub.1 -sin θ)                                             (2)

and an angle α₂, which the exiting light plane at a given exiting heightof the optical lens system makes with the optical axis, is defined bythe following equation (3):

    tan α.sub.2 =(-n cos θ.sub.1 +cos Φ)/(n sin θ.sub.1 -sin Φ)                                               (3)

where, n is the refractive index of the lens optical system, J(θ) is theradiant intensity of the light source in the direction of an angle θwith respect to the optical axis, θ₁ is an angle which a ray proceedingthrough the optical lens system to the exiting light plane makes withthe optical axis, and φ is an angle which a ray proceeding from theoptical lens system at a given exiting height on the exiting light placeof the optical lens system makes with the optical axis.

According to another aspect of the invention, an optical lighting systemis provided which comprises an optical mirror system, having areflecting surface and a optical axis, which is placed in the rear of alight source to irradiate a surface which is located in front of thelight source. Irradiance at an irradiation height H on the surface to beirradiated is defined as S(H), and the relationship between angle θ,which a ray proceeding from the light source to the reflecting surfaceof the optical mirror system makes with the optical axis, and theirradiation height H is defined as the following equation (4):

    ∫S(H)HdH=∫J(θ.sub.1) sin θ.sub.1 dθ.sub.1 +∫J(θ)K(β) sin θdθ            (4)

Thus, an angle α₃, which the reflecting surface at a given incidentheight of the optical mirror system makes with the optical axis, isdefined by the following equation (5):

    tan α.sub.3 =1/ tan {(θ-φ)/2}              (5)

where θ is an angle which a ray proceeding from the light source to themirror optical system makes with the optical axis, θ₁ is an angle whicha ray proceeding from the light source directly to the irradiationheight H makes with the optical axis, J(θ₁) and J(θ) are the radiantintensity of the light source in the directions of angles of θ₁ and θ,respectively, with respect to the optical axis, K(β) is a reflectionfactor of the mirror optical system wherein the incident angle is (β),and φ is an angle which a ray proceeding from the given incident heightof the mirror optical system to the irradiation height H makes with theoptical axis.

According to the present invention, the optical path length from a lightsource to a surface to be irradiated can be greatly decreased withoutreduction of irradiance in the peripheral portion of the surface to beirradiated in a contact or proximity exposure system. As a result, theoverall size of the irradiator can be decreased. Furthermore, irradianceon an image surface can be unified without interposing a gradientfilter, and the like, in the optical path in a projection system. As aresult, the light is efficiently utilized.

Accordingly, it is an object of the present invention to provide anoptical lighting system which can unify irradiance on a surface to beirradiated and decrease the optical path length thereby decreasing theoverall device size, in a contact or proximity exposure system, and canunify irradiance on an image surface while efficiently utilizing lightquantity without using a gradient filter and the like, in a projectionsystem.

These and other objects, features, aspects and advantages of the presentinvention will become more apparent from the following detaileddescription of the present invention when taken in conjunction with theaccompanying drawings.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 and FIG. 2 illustrate prior art lighting systems.

FIG. 3 is a view showing a lens optical system according to anembodiment of an optical lighting system in accordance with the presentinvention.

FIG. 4 and FIG. 5 are enlarged views showing the portions IV and V ofFIG. 3, respectively.

FIG. 6 is a perspective view schematically showing an optical lightingsystem using the lens optical system shown in FIG. 3.

FIG. 7 is a view showing a Fresnel lens according to another embodimentof the optical lighting system in accordance with the present invention.

FIG. 8 and FIG. 9 are enlarged views showing the portions VIII and IX ofFIG. 7, respectively.

FIG. 10 is a view showing a optical mirror system according to stillanother embodiment of the optical lighting system in accordance with thepresent invention.

FIG. 11 is an enlarged view showing the portions XI of FIG. 10.

FIG. 12 is a view showing a Fresnel mirror according to still anotherembodiment of the optical lighting system in accordance with the presentinvention.

FIG. 13 to FIG. 39 are ray tracing views showing Examples 1-27 of theoptical lighting system in accordance with the present invention,respectively.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

An optical lighting system according to the present invention includes aoptical lens system or an optical mirror system. In the followingdescription, the principle of the present invention when utilizing anoptical lens system will be described in reference FIG. 3 to FIG. 9. Theprinciple of the present invention when utilizing an optical mirrorsystem will be described in reference to FIG. 10 to FIG. 12. The lightsource used in the optical lighting system according to theseembodiments is sufficiently small in comparison with the aperturediameter and focal length of the optical lighting system, and theradiant intensity of J(θ) of the light source is symmetrical withrespect to the optical axis of the optical lighting system.

FIG. 3 is a view showing an optical lens system according to anembodiment of an optical lighting system in accordance with the presentinvention. Referring to FIG. 3, an optical lens system L is placedbetween a light source LS and a surface P to be irradiated. Assuming avirtual sphere having a radius of r is located around the light sourceLS, as shown in FIG. 6, the area δS₁ of a circular band W₁ on thevirtual sphere, inner and outer circles of which are defined by radiallines extending from the center O of the virtual sphere in angles θ andθ+δθ with respect to an optical axis Z, respectively, is given by thefollowing equation:

    δS.sub.1 =2πr.sup.2 sin θδθ     (6)

A solid angle δΩ₁ for viewing the circular band W₁ from the center O ofthe virtual sphere is

    δΩ.sub.1 =2π sin θδθ      (7)

and hence radiant flux F passing through the circular band W₁ is givenby the following equation as the product of the solid angle δΩ₁ and theradiant intensity J(θ):

    F=J(θ).2π sin θδθ               (8)

Assuming that the radiant flux F irradiates a circular band W₂ on asurface P to be irradiated, and which has an outer radius H and δ H inwidth, through an optical lens system L, the area δ S₂ of the circularband W₂ is

    δS.sub.2 =2πHδH                             (9)

and hence if the transmission factor of the optical lens system L is100%, the illuminance S(H) of the circular band W₂ on the surface P tobe irradiated is given by the following equation:

    S(H)=J(θ) sin θδθ/HδH        (10)

The aforementioned equation (1) is obtained from the equation (10).

    ∫S(H)HdH=∫J(θ) sin θdθ         (1)

This equation (1) defines a relationship between an angle θ, which a rayproceeding from the light source LS to the incident height R₁ of theoptical lens system L makes with the optical axis Z and a irradiationheight H.

In other words, equation (1) defines the exiting angle θ of a rayemitted from the light source LS, when irradiance S(H) on the surface Pto be irradiated is set by a given function which satisfies

    S(H)≧S(O)                                           (11)

for example, to unify irradiance all over the surface P to be irradiatedin a contact or proximity exposure system, or to increase irradiance atthe peripheral portion of the surface P to be irradiated to unify theirradiance of an image surface in a projection system.

It will be now described that a ray emitted from the light source LS inan outgoing angle θ can be led to a given irradiation height H bydefining angles α₁ and α₂ which the light incident and exiting planes F₁and F₂ of the optical lens system L make with the optical axis,respectively, by the aforementioned equations (2) and (3).

Referring to FIG. 3, a ray emitted from the light source LS at outgoingangle θ reaches the point Q of an incident height R₁ on the lightincident plane F₁ of the optical lens system L. FIG. 4 is an enlargedview showing the portion IV of FIG. 3. When the Snell's law is appliedat the point Q in FIG. 4, the following equation results: ##EQU1## whereα₁ is an angle which the light incident plane F₁ at the point Q makeswith the optical axis Z, β is an angle which a normal line N₁ dropped tothe point Q makes with the optical axis Z, and θ₁ is an angle which aray refracted at the light incident plane F₁ makes with the optical axisZ.

The following equation is obtained by substituting equation (13) in theequation (12) and simplifying same: ##EQU2## The aforementioned equation(2) is obtained by dividing the both sides of the equation (14) by cosα₁ and simplifying the same:

    tan α.sub.1 =(-n cos θ.sub.1 +cos θ)/(n sin θ.sub.1 -sin θ)                                             (2)

At the other side of lens L a ray refracted at the light exiting planeF₂ of the optical lens system L emerges from point T at outgoing heightR₂ of the light exiting plane F₂. FIG. 5 is an enlarged view showing theportion V of FIG. 3. When Snell's law is applied at the point T in FIG.5, the following equation results:

    n sin (γ-θ.sub.1)=sin (γ-φ)          (15)

    γ=α.sub.2 -90°                          (16)

where α₂ is an angle which the light exiting plane F₂ of outgoing at thepoint T makes with the optical axis Z, γ is an angle which a normal lineN₂ dropped to the point T makes with the optical axis Z, and φ is anangle which an exiting ray from the point T makes with the optical axisZ.

The aforementioned equation (3) is obtained by substituting the equation(16) in the equation (15):

    tan α.sub.2 =(-n cos θ.sub.1 +cos θ)/(n sin θ.sub.1 -sin θ)                                             (3)

According to the present invention, a ray emitted from the light sourceLS at an exiting angle reaches the irradiation height H and irradiatessurface P in the desired irradiance S(H) satisfying the aforementionedequation (16), by defining the plane F₁ of incidence of the optical lenssystem L by the equation (2) and the light exiting plane F₂ by theequation (3), as is evident from the above description.

The embodiment where the optical lens system is constructed with aFresnel lens will now be described. FIG. 7 is a view showing a Fresnellens according to this second embodiment of the optical lighting systemin accordance with the present invention. As shown in FIG. 7, a rayemitted from a light source LS at outgoing angle θ reaches the point Qof a incident height R₁ on the flat light incident plane F₁ of theFresnel Lens FL. FIG. 8 is an enlarged view showing the portion VIII ofFIG. 7. When Snell's law is applied at point Q in FIG. 8, the followingequation results:

    sin θ=n sin θ.sub.1                            (17)

The equation (17) is rewritten into the following equation: ##EQU3##

At the other side of Fresnel lens FL, a ray refracted at the lightincident plane F₁ of the Fresnel lens FL emerges at the outgoing heightR₂ of a Fresnel optical surface F_(s), in FIG. 7. FIG. 9 is an enlargedview showing the portion IX of FIG. 7. When Snell's law is applied atthe point T in FIG. 9, the aforementioned equation (3) is obtained:

    tan α.sub.2 =(-n cos θ.sub.1 +cos φ)/(n sin θ.sub.1 -sin θ)                                             (3)

The following equation is obtained by substituting the above equation(17) and (18) in the equation (3): ##EQU4##

When the Fresnel lens is utilized, desired irradiance distributionsimilar to the optical lens system L as hereinbefore described can beobtained by forming the Fresnel optical surface F_(s) in accordance withthe equation (19).

The use of a Fresnel optical system FL to obtain uniform irradiancedistribution on the surface P to be irradiated will now be described inmore detail. Assuming that the irradiance S(H) on the surface P to beirradiated, which appears in the aforementioned equation (1), is definedas S(H)=S(0)=K (k: constant), the following equation is obtained:

    ∫KHdH=∫J(θ) sin θdθ            (20)

When the radiant intensity of the light source LS is defined as J(Q)=1(in the case of an ideal point light source), the following equationsare obtained from equation (20):

    (k/2)H.sup.2 =1-cos θ=2 sin .sup.2 (θ/2)       (21)

    ∴H=(2/√k) sin (θ/2) . . .             (22)

This equation (22) defines a relationship between an angle θ, which isthe angle a ray proceeding from the light source LS to the lightincident plane F₁ of the Fresnel lens FL makes with an optical axis Z,and an irradiation height H. In a paraxial region, the irradiationheight H defined by the above equation (22) is given by the followingequation:

    H=θ(A+B-AB/f)                                        (23)

where A is a distance from the light source LS to the light incidentplane F₁ of the Fresnel lens FL, B is a distance from the light exitingplane F₂ to the surface P to be irradiated on the optical axis Z of theFresnel lens FL, and f is the focal length on the optical axis Z of theFresnel lens FL.

The constant k is given by the following equation by using the equations(22) and (23):

    K=1/(A+B-AB/f).sup.2                                       (24)

The following equation is obtained by substituting equation (24) in theequation (22):

    H=2(A+B-AB/F) sin (θ/2)                              (25)

This equation (25) defines a relationship between the exiting angle θfrom the light source LS and the irradiation height H, in the case wherethe distances A and B between the light source LS, the Fresnel lens FLand the surface P to be irradiated are appropriately defined and thesurface P to be irradiated is irradiated in uniform irradiance by usinga point light source.

That is, the configuration of the Fresnel lens FL is determined throughthe steps where first the incident height R₁ on the light incident planeF₁ is defined with respect to the exiting angle θ from the light sourceLS, secondly the outgoing height R₂ is defined on the assumption thatthe thickness D of the Fresnel lens FL is negligible, and thirdly theinclination angle α₂ of the Fresnel optical surface F_(s) at the exitingheight R₂ is defined by the aforementioned equation (19).

FIG. 10 is a view showing an optical mirror system according to a thirdembodiment of the optical lighting system in accordance with the presentinvention. In the case of an optical mirror system, the followingequation can be applied in place of the equation (10) in the opticallens system as hereinbefore described: ##EQU5##

In this equation (26), the first term of the right side corresponds toirradiance by direct light from a light source LS, and the second termof the right side corresponds to irradiance by reflection light which isgenerated by reflecting light emitted from the light source LS by anoptical mirror system M. The first term is substantially negligible ifthe light source LS is a surface light source or the like which emitslight only toward the optical mirror system M.

The aforementioned equation (4) is obtained from the above equation(26).

    S(H)HδH=∫J(θ.sub.1) sin θ.sub.1 δθ.sub.1 +∫J(θ)K(β) sin θδθ      (4)

This equation (4) defines a relationship between an angle θ, which isthe angle a ray proceeding from the light source LS to the incidentheight R₃ of the mirror optical system M makes with an optical axis Z,and an irradiation height H.

That is, this equation shows that the optical mirror system M can beformed to obtained desired illuminance S(H) on a surface P to beirradiated as is similar to the case of the optical lens system L.

It will now be described that an angle α₃, which a reflection surface F₃at the incident height R₃ of the optical mirror system M makes with theoptical axis Z is defined by the aforementioned equation (5).

It is assumed that a ray emitted from the light source LS is an exitingangle θ irradiates the point T of the incident height R₃ on thereflection surface F₃ of the optical mirror system M. FIG. 11 is anenlarged view showing the portion XI of FIG. 10.

When the law of reflection is applied to the point T in FIG. 11, thefollowing equation results:

    β=γ+φ (27)

where, β is an angle which an incident ray makes with a normal line N₃dropped on the point T, γ is an angle which the normal line N₃ makeswith the optical axis Z, and φ is an angle which a reflected ray makeswith the optical axis Z. The following equation defines the relationshipbetween the angles β and γ

    β+γ=θ                                     (28)

and the following equation defines the relationship between the angles γand α₃ :

    α.sub.3 90°-γ                           (29)

The following equation is obtained from the equations (27), (28) and(29):

    α.sub.3 =90°+(φ-θ)/2                (30)

The aforementioned equation (5) is obtained by taking the tangent of theboth sides of the equation (30):

    tan α.sub.3 =1/ tan {(θ-φ)/2}              (5)

That is, the mirror optical system M can be implemented so as to providedesired irradiance S(H), similar to the case of the lens optical systemL, by forming the reflection surface F₃ of the mirror optical system Min accordance with the equation (5).

Further, it is evident that the same irradiance distribution as themirror optical system M hereinbefore described can be obtained by usinga Fresnel mirror FM, by forming a Fresnel optical surface F_(s) inaccordance with the aforementioned equation (5), as shown in FIG. 12.

Examples 1 to 27 which illustrate the present invention will now bediscussed in accordance with the following classification wherein theexamples are broadly classified into a lens optical system and a mirroroptical system. These examples further illustrate the preferredembodiments within the scope of the present invention.

Lens Optical System

(1) lens optical system including an aspheric surface lens . . . L

(i) for contact or proximity exposure . . . L1

(ii) for projection . . . L2

(2) lens optical system including a Fresnel lens . . . LF

(i) for contact or proximity exposure . . . FL1

(ii) for projection . . . FL2

Mirror Optical System

(1) mirror optical system including an aspheric surface mirror . . . M

(i) for contact or proximity exposure . . . M1

(ii) for projection . . . M2

(2) mirror optical system including a Fresnel mirror . . . FM

(i) for contact or proximity exposure . . . FM1

(ii) for projection . . . FM2

Examples 1-27 will be illustrated by using the parameters as hereinafterdescribed, lens or mirror data on the basis of parameter values and raytracing views according to respective lens or mirror optical systems.

The various parameters are represented by the following symbols:

(A) In the case of a lens optical system (see FIG. 3 to FIG. 5)

A: distance between a light source LS and a plane F₁ of incidence

B: distance between an outgoing plane F₂ and a surface P to beirradiated

D: thickness of a lens L

f: focal length of the lens optical system in a paraxial region

n: refractive index of the lens L

H: irradiation height on the surface P to be irradiated

θ: angle which an outgoing ray from the light source LS makes with anoptical axis Z

φ: angle which an outgoing ray from the outgoing plane F₂ of the lens Lmakes with the optical axis Z

α₂ : angle which the outgoing plane F₂ at an outgoing height R₂ makeswith the optical axis Z

D₂ : sag at the outgoing height R₂, which is a distance between the footof a perpendicular dropped to the optical axis Z from the outgoing planeF₂ at the outgoing height R₂ and the top of the outgoing plane F₂

E: efficiency factor for all radiant flux from the light source LS

In these examples, the plane of incidence is formed using a spherical orflat surface, and hence values as to symbols α₁, R₁ and D₁ in FIG. 3 arenot shown.

(B) In the case of a mirror optical system (see FIG. 10 to FIG. 12)

A: distance between a light source LS and a reflecting surface F₃

B: distance between the reflecting F₂ and a surface P to be irradiated

H: irradiation height on the surface P to be irradiated

θ: angle which an outgoing ray from the light source LS makes with anoptical axis Z

φ: angle which a reflected ray from the reflecting surface F₃ makes withthe optical axis Z

α₃ : angle which the reflecting surface F₃ makes with the optical axis Z

R₃ : reflective height of the reflected ray on the reflecting surface F₃

D₃ : sag at the outgoing height R₃, which is a distance between the footof a perpendicular dropped to the optical axis Z from the plane F₃ atthe reflective height R₃ and the top of the reflecting surface F₃

E: efficiency factor for all radiant flux from the light source LS

The reflection factor of each mirror optical system is adapted tosatisfy K(β)=0.9.

Further it is assumed that radiant intensity distribution is uniform andhence J(θ)=1 when the light source LS is a point light source, andJ(θ)=cos θ is applied when the light source LS is a surface illuminant.In the following description, it is assumed that the size of the surfaceilluminated is negligible.

EXAMPLE 1

In this example a lighting optical system comprising lens optical systemL was used in a close contact or proximity exposure system in whichirradiance on a surface P was uniform all over the surface P. Theoperating parameters and lens data are shown in Table 1 and a raytracing view in accordance with this lens L is shown in FIG. 13.

In this example, the incidence plane F₁ of this lens L was a sphericalsurface when was convex toward a point light source LS and the outgoingplane F₂ thereof was an aspheric surface. In FIG. 13, the symbol M_(O)denotes a spherical mirror for forward reflecting of a ray emittedbackward from the point light source LS.

                  TABLE 1                                                         ______________________________________                                        A = 30 mm  B = 600 mm  D = 80 mm  f = 200 mm                                  E = 55%  n = 1.5  R.sub.1 = 400 mm                                            H (mm) θ (deg)                                                                          φ (deg)                                                                            α.sub.2 (deg)                                                                  R.sub.2 (mm)                                                                         D.sub.2 (mm)                           ______________________________________                                        25.0   3.0      1.9      92.0   4.3    0.0                                    50.0   6.1      3.9      94.1   8.7    0.3                                    75.0   9.2      5.8      96.1   13.1   0.6                                    100.0  12.4     7.8      98.1   17.5   1.2                                    125.0  15.5     9.7      100.2  21.9   1.9                                    150.0  18.6     11.6     102.2  26.2   2.8                                    175.0  21.7     13.4     104.2  30.6   3.8                                    200.0  24.9     15.2     106.2  34.9   5.0                                    225.0  28.1     17.0     108.2  39.2   6.3                                    250.0  31.3     18.7     110.2  43.5   7.8                                    275.0  34.5     20.4     112.1  47.8   9.5                                    300.0  37.8     22.0     113.8  52.2   11.3                                   325.0  41.1     23.6     115.5  56.5   13.3                                   350.0  44.4     25.1     116.9  61.0   15.5                                   375.0  47.8     26.5     118.1  65.7   17.9                                   400.0  51.2     27.9     118.8  70.6   20.6                                   425.0  54.6     29.2     119.0  76.0   23.6                                   450.0  58.1     30.3     118.4  82.3   27.1                                   475.0  62.7     31.3     116.3  90.6   31.4                                   500.0  65.3     31.8     111.1  103.8  37.2                                   ______________________________________                                    

EXAMPLE 2

In this example an optical lighting system comprising an optical lenssystem L was used in a contact or proximity exposure system in whichirradiance on a surface P to be irradiated was uniform all over thesurface P. The operating parameters and lens data are shown in Table 2and a ray tracing view in accordance with this lens L is shown in FIG.14.

In this example, the incidence plane F₁ of lens L was a flat surface andthe outgoing plane F₂ thereof was an aspheric surface. A light source LSis formed by a surface light source which emits light only toward thelens L.

                  TABLE 2                                                         ______________________________________                                        A = 30 mm  B = 500 mm  D = 100 mm  f = 600 mm                                 E = 94%  n = 1.5                                                              H (mm) θ (deg)                                                                          φ (deg)                                                                            α.sub.2 (deg)                                                                  R.sub.2 (mm)                                                                         D.sub.2 (mm)                           ______________________________________                                        25.0   2.7      2.3      90.9   4.6    0.0                                    50.0   5.5      4.6      91.8   9.3    0.1                                    75.0   8.3      6.9      92.8   14.1   0.3                                    100.0  11.1     9.2      93.9   18.8   0.6                                    125.0  14.0     11.4     95.0   23.6   0.9                                    150.0  16.8     13.6     96.3   28.5   1.4                                    175.0  19.8     15.7     97.8   33.5   2.0                                    200.0  22.8     17.7     99.4   38.5   2.8                                    225.0  25.8     19.7     101.2  43.7   3.7                                    250.0  28.9     21.7     103.2  49.0   4.9                                    275.0  32.1     23.5     105.4  54.4   6.2                                    300.0  35.5     25.2     107.9  60.1   7.9                                    325.0  39.0     26.9     110.6  65.9   10.0                                   350.0  42.6     28.4     113.7  72.0   12.4                                   375.0  46.6     29.9     117.1  78.4   15.5                                   400.0  50.8     31.2     120.9  85.4   19.4                                   425.0  55.4     32.3     125.2  93.1   24.4                                   450.0  60.6     33.1     130.2  102.3  31.5                                   475.0  66.9     33.5     136.3  114.6  43.2                                   500.0  75.6     32.1     145.6  139.2  73.9                                   ______________________________________                                    

EXAMPLE 3

In this example an optical lighting system comprising an optical lenssystem L was used in a contact or proximity exposure system in whichirradiance on a surface P to be irradiated was uniform all over thesurface P. The operating parameters and lens data are shown in Table 3and a ray tracing view in accordance with this lens L is shown in FIG.15.

In this example, the incidence plane F₁ of this lens L was a sphericalsurface which was concave toward a light source LS and the outgoingplane F₂ thereof was an aspheric surface. The light source LS was formedby a surface light source which emits light only toward the lens L.

                  TABLE 3                                                         ______________________________________                                        A = 40 mm  B = 500 mm  D = 100 mm  f = 900 mm                                 E = 94%  n = 1.5  R.sub.1 = -400 mm                                           H (mm) θ (deg)                                                                          φ (deg)                                                                            α.sub.2 (deg)                                                                  R.sub.2 (mm)                                                                         D.sub.2 (mm)                           ______________________________________                                        25.0   2.7      2.2      91.3   5.3    0.0                                    50.0   5.5      4.4      92.7   10.6   0.2                                    75.0   8.3      6.7      94.1   16.0   0.5                                    100.0  11.1     8.9      95.7   21.5   1.0                                    125.0  14.0     11.0     97.3   26.9   1.6                                    150.0  16.9     13.1     99.1   32.5   2.4                                    175.0  19.8     15.2     101.0  38.1   3.4                                    200.0  22.8     17.1     103.2  43.8   4.6                                    225.0  25.8     19.0     105.6  49.7   6.1                                    250.0  29.0     20.9     108.3  55.6   8.0                                    275.0  32.2     22.6     111.3  61.7   10.1                                   300.0  35.6     24.3     114.7  68.0   12.8                                   325.0  39.1     25.8     118.5  74.4   16.0                                   350.0  42.8     27.3     122.8  81.0   19.9                                   375.0  46.7     28.6     127.7  87.9   24.8                                   400.0  50.9     29.8     133.3  95.0   30.9                                   425.0  55.5     30.8     139.8  102.5  38.7                                   450.0  60.8     31.7     147.5  110.4  49.5                                   475.0  67.2     32.1     157.3  118.8  65.6                                   500.0  76.0     32.0     171.0  127.2  95.7                                   ______________________________________                                    

EXAMPLE 4

In this example an optical lighting system comprising an optical lenssystem L was used in a projection system in which irradiance on asurface P to be irradiated was higher in the peripheral portion of thesurface P. The operating parameters and lens data are shown in Table 4and a ray tracing view in accordance with lens L is shown in FIG. 16.

In this example, the incidence plane F₁ of this lens L was a flatsurface and the outgoing plane F₂ thereof was an aspheric surface. Aspherical mirror M_(O) was placed in the rear of a point light surfaceLS.

In this example, it is assumed that the effective half field angle of animage-formation lens (not shown) is 26.6°, and relative irradiance onthe surface P to be irradiated is set as shown in Table 4 to unify theirradiance of an image surface.

                  TABLE 4                                                         ______________________________________                                        A = 40 mm  B = 500 mm  D = 100 mm                                             f = 400 mm  E = 67%  n = 1.5                                                  H                             R.sub.2                                                                             D.sub.2                                                                             relative                            (mm)  θ (deg)                                                                         φ (deg)                                                                            α.sub.2 (deg)                                                                  (mm)  (mm)  irradiated                          ______________________________________                                        25.0  3.0     2.2      91.6   5.6   0.0   1.00                                50.0  6.0     4.4      93.3   11.2  0.3   1.00                                75.0  9.1     6.6      95.0   16.9  0.7   1.01                                100.0 12.1    8.7      96.7   22.6  1.3   1.01                                125.0 15.2    10.8     98.6   28.4  2.0   1.03                                150.0 18.4    12.9     100.6  34.2  3.0   1.04                                175.0 21.6    14.9     102.7  40.1  4.2   1.06                                200.0 24.8    16.9     105.0  46.1  5.7   1.08                                225.0 28.2    18.8     107.5  52.1  7.5   1.10                                250.0 31.6    20.6     110.1  58.3  9.6   1.12                                275.0 35.1    22.3     113.0  64.5  12.1  1.15                                300.0 38.6    23.9     115.9  70.9  15.0  1.18                                325.0 42.3    25.5     119.1  77.5  18.4  1.22                                350.0 46.2    26.9     122.2  84.3  22.4  1.26                                375.0 50.2    28.2     125.9  91.4  27.2  1.30                                400.0 54.3    29.4     129.4  98.9  33.0  1.34                                425.0 58.6    30.4     133.1  107.1 40.2  1.39                                450.0 63.2    31.2     136.9  116.5 49.7  1.44                                475.0 68.0    31.6     140.9  128.1 63.0  1.50                                500.0 73.0    31.3     145.4  144.2 84.6  1.56                                ______________________________________                                    

EXAMPLE 5

In this example an optical lighting system comprising an optical lenssystem L was used in a projection system in which irradiance on asurface P to be irradiated was higher in the peripheral portion of thesurface P. The operating parameters and lens data are shown in Table 5and a ray tracing view in accordance with lens L is shown in FIG. 17.

In this example, the incidence plane F₁ of lens L was a sphericalsurface which is concave toward a point light source LS and the outgoingplane F₂ thereof was an aspheric surface. A spherical mirror M_(O) isplaced in the rear of a point light surface LS.

Also in this example, relative irradiance on the surface P to beirradiated is as shown in Table 5 to unify the irradiance of an imagesurface, as is similar to example 4.

                  TABLE 5                                                         ______________________________________                                        A = 30 mm  B = 400 mm  D = 150 mm  f = 700 mm                                 E = 85%  n = 1.5  R.sub.1 = -400 mm                                           H                             R.sub.2                                                                             D.sub.2                                                                             relative                            (mm)  θ (deg)                                                                         φ (deg)                                                                            α.sub.2 (deg)                                                                  (mm)  (mm)  irradiated                          ______________________________________                                        25.0  3.4     2.4      92.2   7.9   0.1   1.00                                50.0  6.8     4.8      94.4   15.8  0.6   1.00                                75.0  10.2    7.2      96.7   23.8  1.3   1.01                                100.0 13.6    9.6      99.1   31.8  2.4   1.02                                125.0 17.1    11.9     101.7  39.8  3.9   1.03                                150.0 20.7    14.1     104.5  47.9  5.8   1.04                                175.0 24.3    16.2     107.5  55.9  8.1   1.06                                200.0 28.0    18.3     110.7  64.0  10.9  1.08                                225.0 31.7    20.2     114.2  72.1  14.2  1.10                                250.0 35.6    22.0     118.0  80.2  18.2  1.12                                275.0 39.5    23.8     122.2  88.2  22.8  1.15                                300.0 43.6    25.4     126.6  96.2  28.3  1.18                                325.0 47.9    26.9     131.4  104.1 34.7  1.22                                350.0 52.3    28.3     136.5  111.8 42.1  1.26                                375.0 56.9    29.5     142.0  119.5 51.0  1.30                                400.0 61.7    30.6     147.8  126.9 61.6  1.34                                425.0 66.8    31.4     154.2  134.1 74.7  1.39                                450.0 72.1    32.1     161.3  141.0 91.4  1.44                                475.0 77.8    32.5     169.2  146.8 113.7 1.50                                500.0 83.9    32.7     178.2  150.2 144.4 1.56                                ______________________________________                                    

EXAMPLE 6

In this example an optical lighting system comprising a lens opticalsystem L was used in a projection system in which irradiance on asurface P to be irradiated was higher in the peripheral portion of thesurface P. The operating parameters and lens data are shown in Table 6and a ray tracing view in accordance with lens L is shown in FIG. 18.

In this example, the incidence plane F₁ of lens L was a sphericalsurface which is convex toward a point light source LS and the outgoingplane F₂ of outgoing thereof was an aspheric surface. The light sourceLS was a surface light source which emits light only toward the lens L.

Also in this example, relative irradiance on the surface P to beirradiated is as shown in Table 6, as is similar to example 4.

                  TABLE 6                                                         ______________________________________                                        A = 25 mm  B = 600 mm  D = 50 mm  f = 500 mm                                  E = 87%  n = 1.5  R.sub.1 = 600 mm                                            H                             R.sub.2                                                                             D.sub.2                                                                             relative                            (mm)  θ (deg)                                                                         φ (deg)                                                                            α.sub.2 (deg)                                                                  (mm)  (mm)  irradiated                          ______________________________________                                        25.0  2.3     2.1      90.3   2.3   0.0   1.00                                50.0  4.7     4.3      90.7   4.7   0.0   1.00                                75.0  7.1     6.4      91.1   7.2   0.0   1.01                                100.0 9.5     8.5      91.6   9.6   0.1   1.02                                125.0 12.0    10.6     92.2   12.1  0.2   1.03                                150.0 14.5    12.6     92.9   14.7  0.3   1.04                                175.0 17.1    14.7     93.8   17.3  0.4   1.06                                200.0 19.7    16.6     94.9   20.1  0.6   1.08                                225.0 22.4    18.5     96.1   22.9  0.9   1.10                                250.0 25.2    20.4     97.6   25.9  1.3   1.12                                275.0 28.2    22.2     99.3   29.0  1.7   1.15                                300.0 31.3    23.9     101.2  32.2  2.3   1.18                                325.0 34.5    25.6     103.5  35.7  3.1   1.22                                350.0 38.0    27.2     105.9  39.5  4.1   1.26                                375.0 41.7    28.6     108.7  43.6  5.3   1.30                                400.0 45.7    30.0     111.8  48.1  7.0   1.34                                425.0 50.2    31.3     115.1  53.3  9.3   1.39                                450.0 55.2    32.4     118.6  59.7  12.5  1.44                                475.0 61.3    33.3     121.8  68.7  17.8  1.50                                500.0 69.0    33.1     122.3  88.1  30.2  1.56                                ______________________________________                                    

EXAMPLE 7

In this example an optical lighting system comprising a Fresnel lens FLwas used in a contact or proximity exposure system in which irradianceon a surface P to be irradiated was uniform all over the surface P. Theoperating parameters and lens data are shown in Table 7 and a raytracing view in accordance with this Fresnel lens FL is shown in FIG.19.

The light source LS was a point light source.

                  TABLE 7                                                         ______________________________________                                        A = 125 mm  B = 500 mm  f = 278 mm  n = 1.491                                 R.sub.2 (mm)                                                                            α.sub.2 (deg)                                                                    θ (deg)                                                                           φ (deg)                                                                          H (mm)                                    ______________________________________                                         10       94.2     4.6       2.5    31.9                                       20       98.4     9.1       5.0    63.4                                       40       106.5    17.7      9.5    123.4                                      60       114.2    25.6      13.2   177.6                                      80       121.3    32.6      16.2   224.8                                     100       127.6    38.7      18.3   264.9                                     125       134.5    45.0      19.9   306.3                                     150       140.4    50.2      20.8   339.5                                     200       149.7    58.0      20.6   388.0                                     250       156.6    63.4      18.9   420.8                                     300       162.0    67.4      16.1   440.0                                     350       166.1    70.4      12.5   461.0                                     400       169.0    72.7      8.4    474.1                                     500       172.3    76.0      -0.9   492.6                                     560       173.0    77.4      -6.8   500.5                                     ______________________________________                                    

EXAMPLE 8

In this example an optical lighting system comprising a Fresnel lens FLwas used in a contact or proximity exposure system in which irradianceon a surface P to be irradiated is uniform all over the surface P. Theoperating parameters and lens data are shown in Table 8 and a raytracing view in accordance with this Fresnel lens FL is shown in FIG.20.

In this example, parameters values A, B and f were selected so that anoutgoing angle φ from the Fresnel lens FL had a small angle,approximately parallel light.

According to this example, a declination angle on the surface P waswithin 3° and hence the surface P can be irradiated by light which isalmost parallel light, although the optical path length becomes longerthan that in example 17 hereinafter described. Therefore, a small gapbetween a pattern original and a photosensitive material, will notresult in lowering of resolution or misregistration. The light source LSwas a point light source.

                  TABLE 8                                                         ______________________________________                                        A = 340 mm  B = 1360 mm  f = 389 mm  n = 1.491                                R.sub.2 (mm)                                                                            α.sub.2 (deg)                                                                    θ (deg)                                                                           φ (deg)                                                                          H (mm)                                    ______________________________________                                         25       97.5     4.2       0.5    37.5                                       50       104.7    8.4       1.0    74.6                                       75       111.7    12.4      1.5    110.8                                     100       118.1    16.4      1.9    145.8                                     125       124.1    20.2      2.3    179.2                                     150       129.4    23.8      2.6    210.9                                     175       134.2    27.2      2.8    240.8                                     200       138.5    30.5      2.9    268.7                                     250       145.7    36.3      2.9    318.8                                     300       151.3    41.4      2.6    361.7                                     400       159.2    49.6      1.2    429.2                                     500       164.0    55.8      -0.9   478.4                                     556       166.0    58.6      -2.4   500.1                                     ______________________________________                                    

EXAMPLE 9

In this example an optical lighting system comprising a Fresnel lens FLwas used in a contact or proximity exposure system in which irradianceon a surface P to be irradiated was uniform all over the surface P. Theoperating parameters and lens data are shown in Table 9 and a raytracing view in accordance with this Fresnel lens FL is shown in FIG.21.

This example is useful when the Fresnel lens FL must be kept away from alight source LS to prevent deleterious effects due to heat from lightsource LS.

According to this example, the declination angle was relatively small,for example 12.8°, the optical path length was small, for example 800mm, while a 1000 mm effective area was uniformly irradiated. The lightsource LS was a point light source.

                  TABLE 9                                                         ______________________________________                                        A = 400 mm  B = 400 mm  f = 600 mm  n = 1.491                                 R.sub.2 (mm)                                                                            α.sub.2 (deg)                                                                    θ (deg)                                                                           φ (deg)                                                                          H (mm)                                    ______________________________________                                         25       94.9     3.6       1.2    33.3                                       50       99.7     7.1       2.3    66.3                                       75       104.6    10.6      3.4    98.7                                      100       109.4    14.0      4.3    130.3                                     150       118.9    20.6      5.8    190.3                                     200       128.0    26.6      6.4    245.1                                     250       136.5    32.0      6.3    294.1                                     300       143.9    36.9      5.3    337.3                                     350       150.3    41.2      3.6    375.2                                     400       155.5    45.0      1.2    408.2                                     500       162.6    51.3      -5.4   462.1                                     591       165.8    55.9      -12.8  500.0                                     ______________________________________                                    

EXAMPLE 10

In this example an optical lighting system comprising a Fresnel lens FLwas used in a contact or proximity exposure system in which irradianceon a surface P to be irradiated was uniform all over the surface P. Theoperating parameters and lens data are shown in Table 10 and a raytracing view in accordance with this Fresnel lens FL is shown in FIG.22.

In this example, the diameter of the area which was irradiated was setat 7.78 mm, and the distance B of the gap between the Fresnel lens FLand the surface P to be irradiated was set at 100 mm. This example isuseful when irradiating a relatively small area from relatively faraway. The light source LS was a point light source.

                  TABLE 10                                                        ______________________________________                                        A = 10 mm  B = 100 mm  f = 9.4 mm  n = 1.491                                  R.sub.2 (mm)                                                                            α.sub.2 (deg)                                                                    θ (deg)                                                                           φ (deg)                                                                          H (mm)                                    ______________________________________                                        0.5       96.2     2.9       -0.2   0.18                                      1.0       102.2    5.7       -0.4   0.36                                      1.5       108.1    8.5       -0.6   0.54                                      2.0       113.6    11.3      -0.7   0.71                                      3.0       123.5    16.7      -1.1   1.05                                      4.0       131.8    21.8      -1.5   1.37                                      6.0       144.2    31.0      -2.3   1.93                                      8.0       152.4    38.7      -3.2   2.40                                      10.0      158.0    45.0      -4.1   2.77                                      12.5      162.6    51.3      -5.4   3.13                                      15.0      165.6    56.3      -6.6   3.41                                      17.5      167.6    60.3      -7.9   3.63                                      20.0      169.0    63.4      -9.2   3.80                                      21.5      169.6    65.1      -10.0  3.89                                      ______________________________________                                    

EXAMPLE 11

In this example an optical lighting system comprising a Fresnel lens FLwas used in a contact or proximity exposure system in which irradianceon a surface P to be irradiated was uniform all over the surface P. Theoperating parameters and lens data are shown in Table 11 and a raytracing view in accordance with this Fresnel lens FL is shown in FIG.23.

In this example, a spherical mirror M_(O) was placed in the rear of apoint light source LS.

                  TABLE 11                                                        ______________________________________                                        A = 120 mm  B = 480 mm  f = 350 mm                                            E = 63%  n = 1.5                                                              H (mm)    θ (deg)                                                                         φ (deg)                                                                              α.sub.2 (deg)                                                                  R.sub.2 (mm)                              ______________________________________                                         25       3.2     2.1        92.3   6.8                                        50       6.5     4.3        94.5   13.8                                       75       9.8     6.4        96.8   20.9                                      100       13.1    8.5        99.2   28.1                                      125       16.5    10.5       101.6  35.5                                      150       19.8    12.5       104.2  43.2                                      175       23.1    14.4       106.8  51.3                                      200       26.5    16.2       109.5  59.9                                      225       29.9    17.9       112.3  69.1                                      250       33.3    19.6       115.3  79.0                                      275       36.8    21.0       118.4  89.8                                      300       40.3    22.4       121.7  101.7                                     325       43.8    23.6       125.2  115.1                                     350       47.3    24.5       128.8  130.4                                     375       51.0    25.2       132.8  148.2                                     400       54.6    25.6       137.0  169.3                                     425       58.4    25.5       141.6  195.2                                     450       62.2    24.8       146.8  227.8                                     475       66.1    23.0       152.8  270.9                                     500       70.0    19.3       159.7  331.1                                     ______________________________________                                    

EXAMPLE 12

In this example an optical lighting system comprising a Fresnel lens FLwas used in a contact or proximity exposure system in which irradianceon a surface P to be irradiated was uniform all over the surface P. Theoperating parameters and lens data are shown in Table 12 and a raytracing view in accordance with this Fresnel lens FL is shown in FIG.24.

In this example, a light source LS was formed by a surface light sourcewhich emits light only toward the Fresnel lens FL.

                  TABLE 12                                                        ______________________________________                                        A = 130 mm  B = 500 mm  f = 650 mm                                            E = 89%  n = 1.5                                                              H (mm)    θ (deg)                                                                         φ (deg)                                                                              α.sub.2 (deg)                                                                  R.sub.2 (mm)                              ______________________________________                                         25       2.7     2.1        91.1   6.1                                        50       5.4     4.3        92.2   12.3                                       75       8.1     6.4        93.4   18.5                                      100       10.8    8.5        94.6   24.9                                      125       13.6    10.5       96.0   31.5                                      150       16.4    12.5       97.5   38.3                                      175       19.2    14.5       99.1   45.4                                      200       22.1    16.3       100.9  52.9                                      225       25.1    18.1       103.0  60.9                                      250       28.1    19.8       105.3  69.5                                      275       31.2    21.4       107.9  78.9                                      300       34.4    22.8       110.8  89.2                                      325       37.8    24.1       114.1  100.9                                     350       41.3    25.2       117.9  114.3                                     375       45.0    26.0       122.2  130.1                                     400       49.0    26.6       127.3  149.5                                     425       53.3    26.6       133.4  174.4                                     450       58.1    25.7       141.0  208.9                                     475       63.6    23.0       150.8  262.6                                     500       70.6    14.5       164.0  369.7                                     ______________________________________                                    

EXAMPLE 13

In this example, the declination angle on surface P to be irradiated wasreduced to 0° by placing a second Fresnel lens FL₂ in the rear of afirst Fresnel lens FL₁. This example is useful for a proximity exposuredevice or the like which needs high accuracy in pattern printing size.

The operating conditions and Fresnel lens data are shown in Table 13 anda ray tracing view in accordance with these Fresnel lenses FL₁ and FL₂is shown in FIG. 25.

In Table 13, B was the gap between the first and second Fresnel lensesFL₁ and FL₂, n' was the refractive index of the second Fresnel lens FL₂,α' was an angle which the Fresnel optical surface of the second Fresnellens FL₂ made with an optical axis, and φ' was a declination angle onthe surface P to be irradiated, which corresponds to an outgoing anglefrom the second Fresnel lens FL₂.

In this example, the plane of incidence of the second Fresnel lens FL₂was uniformly irradiated by the first Fresnel lens FL₁, and parallellight was emitted by the second Fresnel lens FL₂. The luminous fluxdensity of this parallel light can be kept at a constant value even if agap C between the second Fresnel lens FL₂ and the surface P to beirradiated varies, and hence the gap C can be arbitrarily selected.

According to this example, therefore, an area to be irradiated, whichwas 1000 mm in diameter, can be uniformly irradiated all over the areawhile setting an optical path length at a small value (841 mm+C). Thus,high accuracy pattern printing can be ensured. The light source LS was apoint light source.

                  TABLE 13                                                        ______________________________________                                        A = 210 mm  B = 631 mm  f = 350 mm  n = n' = 1.491                            R                                           φ'                            (mm)  α.sub.2 (deg)                                                                    θ (deg)                                                                         φ (deg)                                                                          H (mm) α' (deg)                                                                       (deg)                             ______________________________________                                         46   105.1    12.4    4.9    99.5   99.8   0                                  92   119.0    23.7    8.8    189.6  107.5  0                                 138   130.9    33.3    11.4   265.1  112.4  0                                 184   140.6    41.2    12.7   325.6  114.7  0                                 230   148.2    47.6    12.8   373.2  115.0  0                                 276   154.3    52.7    12.1   410.7  113.7  0                                 322   159.0    56.9    10.6   440.5  111.0  0                                 368   162.7    60.3    8.7    464.4  107.3  0                                 414   165.6    63.1    6.3    483.9  102.7  0                                 460   167.8    65.5    3.6    500.0  97.4   0                                 ______________________________________                                    

EXAMPLE 14

In this example a second Fresnel lens FL₂ was placed in the rear of thefirst Fresnel lens FL₁ according to the present invention. This exampleis useful for the lighting optical system of a proximity exposuredevice, as was similar to example 13.

The operating conditions and Fresnel lens data are shown in Table 14 anda ray tracing view in accordance with these Fresnel lenses FL₁ and FL₂is shown in FIG. 26.

In Table 14, f₁ was a focal length on an optical axis of the firstFresnel lenses FL₁, and f₂, was a focal length on an optical axis of thesecond Fresnel lens FL₂.

In this practical example, a spherical mirror M_(O) was placed in therear of a point light source LS.

                  TABLE 14                                                        ______________________________________                                        A = 120 mm B = 480 mm C = 100 mm f.sub.1 = 350 mm                             f.sub.2 = 663 mm E = 63% n = n' = 1.5                                         H (mm) θ (deg)                                                                          φ (deg)                                                                            α.sub.2 (deg)                                                                  R.sub.2 (mm)                                                                          α' (deg)                        ______________________________________                                        25     3.29     2.16     92.3   6.90    85.69                                 50     6.58     4.31     94.5   13.85   81.43                                 75     9.88     6.43     96.8   20.90   77.27                                 100    13.19    8.52     99.2   28.12   73.27                                 125    16.51    10.56    101.6  35.56   69.45                                 150    19.84    12.53    104.2  43.29   65.86                                 175    23.19    14.44    106.8  51.40   62.50                                 200    26.55    16.26    109.5  59.97   59.40                                 225    29.95    17.99    112.3  69.13   56.57                                 250    33.37    19.61    115.3  79.02   54.01                                 275    36.82    21.10    118.4  89.82   51.73                                 300    40.30    22.44    121.7  101.77  49.73                                 325    43.83    23.61    125.2  115.18  48.04                                 250    47.39    24.58    128.8  130.47  46.69                                 375    51.01    25.29    132.8  148.25  45.71                                 400    54.69    25.66    137.0  169.40  45.20                                 425    58.42    25.58    141.6  195.22  45.31                                 450    62.23    24.83    146.8  227.86  46.33                                 475    66.11    23.03    152.8  270.92  48.87                                 500    70.08    19.38    159.7  331.13  54.36                                 ______________________________________                                    

EXAMPLE 15

In this example an optical lighting system comprising a Fresnel lens FLwas used in a projection system in which irradiance on a surface P to beirradiated was higher in the peripheral portion of the surface P. Theoperating parameters and lens data are shown in Table 15 and a raytracing view in accordance with this Fresnel lens FL is shown in FIG.27.

In this practical example, a spherical mirror M_(O) was placed in therear of a point light source LS.

                  TABLE 15                                                        ______________________________________                                        A = 120 mm B = 480 mm f = 450 mm E = 68% n = 1.5                                                                      relative                              H (mm) θ (deg)                                                                          φ (deg)                                                                            α.sub.2 (deg)                                                                  R.sub.2 (mm)                                                                          irradiated                            ______________________________________                                        25     3.0      2.2      91.6   6.3     1.00                                  50     6.0      4.4      93.3   12.7    1.00                                  75     9.1      6.6      95.0   19.3    1.00                                  100    12.2     8.7      96.8   25.9    1.02                                  125    15.3     10.8     98.8   32.9    1.03                                  150    18.4     12.8     100.8  40.1    1.04                                  175    21.6     14.8     103.1  47.7    1.06                                  200    24.9     16.7     105.6  55.8    1.08                                  225    28.2     18.4     108.3  64.5    1.10                                  250    31.7     20.1     111.3  74.1    1.12                                  275    35.2     21.6     114.5  84.6    1.15                                  300    38.8     22.9     118.1  96.4    1.18                                  325    42.5     24.1     122.1  110.0   1.22                                  350    46.3     25.0     126.4  125.8   1.26                                  375    50.3     25.6     131.2  144.8   1.30                                  400    54.5     25.7     136.6  168.3   1.34                                  425    58.8     25.2     142.7  198.6   1.39                                  450    63.4     23.6     149.7  239.9   1.44                                  475    68.2     19.9     157.9  300.5   1.50                                  500    73.3     11.7     166.9  400.5   1.56                                  ______________________________________                                    

EXAMPLE 16

In this example an optical lighting system comprising a Fresnel lens FLwas used in a projection system in which irradiance on a surface P to beirradiated was higher in the peripheral portion of the surface P, as wassimilar to example 15. The operating parameters and Fresnel lens dataare shown in Table 16 and a ray tracing view in accordance with thisFresnel lens FL is shown in FIG. 28.

The light source LS of this practical example was formed by a surfacelight source which emits light only toward the Fresnel lens FL.

                  TABLE 16                                                        ______________________________________                                        A = 100 mm B = 600 mm f = 650 mm E = 86% n = 1.5                                                                      relative                              H (mm) θ (deg)                                                                          φ (deg)                                                                            α.sub.2 (deg)                                                                  R.sub.2 (mm)                                                                          irradiated                            ______________________________________                                        25     2.3      1.9      90.7   4.1     1.00                                  50     4.7      3.9      91.5   8.2     1.00                                  75     7.1      5.9      92.3   12.4    1.01                                  100    9.5      7.8      93.2   16.7    1.02                                  125    11.9     9.8      94.2   21.1    1.03                                  150    14.4     11.6     95.4   25.7    1.04                                  175    17.0     13.5     96.7   30.5    1.06                                  200    19.6     15.3     98.2   35.6    1.08                                  225    22.3     17.0     99.9   41.0    1.10                                  250    25.1     18.7     101.9  46.8    1.12                                  275    28.0     20.2     104.2  53.2    1.15                                  300    31.0     21.7     106.8  60.2    1.18                                  325    34.2     23.1     109.8  68.1    1.22                                  350    37.7     24.4     113.3  77.2    1.26                                  375    41.3     25.5     117.3  88.0    1.30                                  400    45.3     26.4     122.0  101.2   1.34                                  425    49.7     27.0     127.5  118.1   1.39                                  450    54.7     27.2     134.2  141.4   1.44                                  475    60.6     26.3     142.7  177.5   1.50                                  500    68.0     22.7     154.6  248.1   1.56                                  ______________________________________                                    

EXAMPLE 17

In this example a second Fresnel lens FL₂ was placed in the rear of afirst Fresnel lens FL₁ according to the present invention and a patternoriginal OG was placed on a surface P to be irradiated, just behind thesecond Fresnel lens FL₂, so that the image of the pattern original OGwas projected on an image surface P' through an image-formation lens IL.

The operating conditions and Fresnel lens data are shown in Table 17 anda ray tracing view in accordance with these Fresnel lenses FL₁ and FL₂is shown in FIG. 29.

In Table 17, B was the gap between the first and second Fresnel lensesFL₁ and FL₂, C was the a gap between the second Fresnel lens FL₂ and theimage-formation lens IL, n' was the refractive index of the secondFresnel lens FL₂, α' was an angle which the Fresnel optical surface ofthe second Fresnel lens FL₂ makes with an optical axis, and φ' was adeclination angle on the surface of the original OG.

According to this example, the plane of incidence of the second Fresnellens FL₂ was uniformly irradiated by the first Fresnel lens FL₁ and,therefore, the original OG placed just in the rear of the second Fresnellens FL₂ can be uniformly irradiated. The second Fresnel lens FL₂converged light at the entrance pupil of the image-formation lens ILplaced in the rear of the second Fresnel lens FL₂. Thus, an idealKoehler illumination system was implemented.

The light source LS of this practical example was formed by a pointlight source.

                  TABLE 17                                                        ______________________________________                                        A = 220 mm B = 720 mm f = 335 mm n = 1.51                                     C = 1000 mm n' = 1.491                                                        R              θ       H                                                (mm)  α.sub.2 (deg)                                                                    (deg)  φ (deg)                                                                          (mm)  α' (deg)                                                                       φ' (deg)                        ______________________________________                                        47.5  105.7    12.2   4.1    99.2  100.0  -5.7                                95    119.8    23.4   7.5    189.1 122.1  -10.7                               142.5 131.6    32.9   9.6    264.8 129.4  -14.8                               190   141.0    40.8   10.7   325.8 133.1  -18.0                               237.5 148.4    47.2   10.7   374.0 134.7  -20.5                               285   154.0    52.3   10.0   412.0 134.9  -22.4                               332.5 158.4    56.5   8.7    442.3 134.3  -23.9                               380   161.8    59.9   6.9    446.7 133.1  -25.0                               427.5 164.5    62.8   4.7    486.6 131.4  -25.9                               475   166.5    65.2   2.2    503.0 129.3  -26.7                               ______________________________________                                    

EXAMPLE 18

In this example a second Fresnel lens FL₂ was placed in the rear of thefirst Fresnel lens FL₁ according to the present invention. This exampleis useful for the lighting optical system of a projection device, as issimilar to example 17.

The operating conditions and Fresnel lens data are shown in Table 18 anda ray tracing view in accordance with these Fresnel lenses FL₁ and FL₂is shown in FIG. 30.

In this example, a spherical mirror M_(O) was placed in the rear of apoint light source LS.

                                      TABLE 18                                    __________________________________________________________________________    A = 120 mm B = 480 mm C = 1000 mm f.sub.1 = 350 mm f.sub.2 = 399 mm           n = n' = 1.5 E = 63%                                                                                            relative                                                                      irradia-                                    H (mm)                                                                             θ (deg)                                                                     φ (deg)                                                                        α.sub.2 (deg)                                                                R.sub.2 (mm)                                                                       φ' (deg)                                                                       α' (deg)                                                                     ted                                         __________________________________________________________________________    25   3.29                                                                              2.16 92.3 6.90 -1.43                                                                              97.1 1.000                                       50   6.58                                                                              4.31 94.5 13.85                                                                              -2.86                                                                              104.1                                                                              1.000                                       75   9.88                                                                              6.43 96.8 20.90                                                                              -4.29                                                                              110.1                                                                              1.000                                       100  13.19                                                                             8.52 99.2 28.12                                                                              -5.71                                                                              116.4                                                                              1.000                                       125  16.51                                                                             10.56                                                                              101.6                                                                              35.56                                                                              -7.13                                                                              121.7                                                                              1.000                                       150  19.84                                                                             12.53                                                                              104.2                                                                              43.29                                                                              -8.53                                                                              126.4                                                                              1.000                                       175  23.19                                                                             14.44                                                                              106.8                                                                              51.40                                                                              -9.93                                                                              130.5                                                                              1.000                                       200  26.55                                                                             16.26                                                                              109.5                                                                              59.97                                                                              -11.31                                                                             134.0                                                                              1.000                                       225  29.95                                                                             17.99                                                                              112.3                                                                              69.13                                                                              -12.68                                                                             137.0                                                                              1.000                                       250  33.37                                                                             19.61                                                                              115.3                                                                              79.02                                                                              -14.04                                                                             139.6                                                                              1.000                                       275  36.82                                                                             21.10                                                                              118.4                                                                              89.82                                                                              -15.38                                                                             141.8                                                                              1.000                                       300  40.30                                                                             22.44                                                                              121.7                                                                              101.77                                                                             -16.70                                                                             143.6                                                                              1.000                                       325  43.83                                                                             23.61                                                                              125.2                                                                              115.18                                                                             -18.00                                                                             145.1                                                                              1.000                                       350  47.39                                                                             24.58                                                                              128.8                                                                              130.47                                                                             -19.29                                                                             146.3                                                                              1.000                                       375  51.01                                                                             25.29                                                                              132.8                                                                              148.25                                                                             -20.56                                                                             147.2                                                                              1.000                                       400  54.69                                                                             25.66                                                                              137.0                                                                              169.40                                                                             -21.80                                                                             147.7                                                                              1.000                                       425  58.42                                                                             25.58                                                                              141.6                                                                              195.22                                                                             -23.03                                                                             147.9                                                                              1.000                                       450  62.23                                                                             24.83                                                                              146.8                                                                              227.86                                                                             -24.23                                                                             147.5                                                                              1.000                                       475  66.11                                                                             23.03                                                                              152.8                                                                              270.92                                                                             -25.41                                                                             146.4                                                                              1.000                                       500  70.08                                                                             19.38                                                                              159.7                                                                              331.13                                                                             -26.57                                                                             143.9                                                                              1.000                                       __________________________________________________________________________

EXAMPLE 19

In this example an optical lighting system comprising a mirror opticalsystem M was used in a contact or proximity exposure system in whichirradiance on a surface P to be irradiated was uniform all over thesurface P. The operating conditions and mirror data are shown in Table19 and a ray tracing view in accordance with this mirror optical systemM is shown in FIG. 31.

The light source LS was formed by a point light source.

                  TABLE 19                                                        ______________________________________                                        A = 50 mm B = 800 mm f = 70 mm E = 76%                                        H (mm) θ (deg)                                                                          φ (deg)                                                                            α.sub.3 (deg)                                                                  R.sub.3 (mm)                                                                         D.sub.3 (mm)                           ______________________________________                                        25.0   4.8      1.4      88.3   4.2     0.0                                   50.0   9.7      2.9      86.9   8.5     0.2                                   75.0   14.6     4.4      84.8   12.9    0.5                                   100.0  19.6     5.8      83.1   17.4    1.0                                   125.0  24.6     7.3      81.3   22.1    1.6                                   150.0  29.6     8.7      79.5   27.0    2.5                                   175.0  34.7     10.1     77.6   32.2    3.5                                   200.0  39.9     11.5     75.7   37.8    4.8                                   225.0  45.2     12.8     73.7   43.8    6.5                                   250.0  50.7     14.1     71.7   50.5    8.6                                   275.0  56.2     15.3     69.5   58.0    11.2                                  300.0  61.9     16.5     67.2   66.5    14.6                                  325.0  67.9     17.6     64.8   76.4    18.9                                  350.0  74.0     18.6     62.3   88.1    24.8                                  375.0  80.4     19.5     59.5   102.5   32.8                                  400.0  87.2     20.2     56.5   120.7   44.2                                  425.0  94.4     20.7     53.1   144.9   61.3                                  450.0  102.2    20.8     49.3   179.0   88.7                                  475.0  110.7    20.2     44.7   230.9   137.3                                 500.0  120.2    17.8     38.7   318.2   235.7                                 ______________________________________                                    

EXAMPLE 20

In this example an optical lighting system comprising a mirror opticalsystem M was used in a contact or proximity exposure system in whichirradiance on a surface P to be irradiated was uniform all over thesurface P, as was similar to example 19. The operating conditions andmirror data are shown in Table 20 and a ray tracing view in accordancewith this mirror optical system M is shown in FIG. 32.

The light source LS was a surface light source which emits light onlytoward the mirror M. The size of the surface light source was assumed tobe negligible.

                  TABLE 20                                                        ______________________________________                                        A = 50 mm B = 800 mm f = 120 mm E = 84%                                       H (mm) θ (deg)                                                                          φ (deg)                                                                            α.sub.3 (deg)                                                                  R.sub.3 (mm)                                                                         D.sub.3 (mm)                           ______________________________________                                        25.0   2.7      1.6      89.4   2.4     0.0                                   50.0   5.5      3.2      88.8   4.8     0.0                                   75.0   8.3      4.8      88.2   7.3     0.1                                   100.0  11.1     6.4      87.6   9.8     0.2                                   125.0  14.0     8.0      87.0   12.3    0.3                                   150.0  16.8     9.5      86.3   15.0    0.4                                   175.0  19.7     11.1     85.6   17.7    0.6                                   200.0  22.7     12.6     84.9   20.6    0.9                                   225.0  25.8     14.1     84.1   23.6    1.1                                   250.0  28.9     15.6     83.3   26.7    1.5                                   275.0  32.1     17.0     82.4   30.2    1.9                                   300.0  35.4     18.4     81.4   33.8    2.4                                   325.0  38.9     19.8     80.4   37.9    3.1                                   350.0  42.6     21.1     79.2   42.4    3.9                                   375.0  46.5     22.3     77.9   47.5    4.9                                   400.0  50.7     23.5     76.4   53.4    6.3                                   425.0  55.3     24.7     74.6   60.5    8.1                                   450.0  60.5     25.7     72.5   69.5    10.7                                  475.0  66.8     26.6     69.8   81.8    14.9                                  500.0  75.4     27.1     65.8   102.3   23.3                                  ______________________________________                                    

EXAMPLE 21

In this example an optical lighting system comprising a mirror opticalsystem M was used in a contact or proximity exposure system in whichirradiance on a surface P to be irradiated was uniform all over thesurface P, as was similar to example 19. The operating parameters andmirror data are shown in Table 21 and a ray tracing view in accordancewith this mirror optical system M is shown in FIG. 33.

The light source LS was a surface light source which emits light onlytoward the mirror M and was negligible in size. The declination anglewas smaller than 3° and hence this example can be utilized in aproximity exposure system.

                  TABLE 21                                                        ______________________________________                                        A = 455 mm B = 900 mm f = 526 mm E = 68%                                      H (mm) θ (deg)                                                                          φ (deg)                                                                            α.sub.3 (deg)                                                                  R.sub.3 (mm)                                                                         D.sub.3 (mm)                           ______________________________________                                        25.0   2.4      0.3      88.9   19.7    0.1                                   50.0   4.9      0.6      87.8   39.5    0.7                                   75.0   7.4      0.9      86.7   59.4    1.6                                   100.0  9.9      1.3      85.6   79.6    3.0                                   125.0  12.5     1.5      84.5   100.0   4.7                                   150.0  15.0     1.8      83.3   120.7   6.9                                   175.0  17.6     2.1      82.2   141.8   9.6                                   200.0  20.3     2.3      81.0   163.5   12.8                                  225.0  22.9     2.5      79.7   185.8   16.5                                  250.0  25.7     2.6      78.4   208.8   21.0                                  275.0  28.4     2.7      77.1   232.7   26.1                                  300.0  31.3     2.7      75.7   257.6   32.1                                  325.0  34.3     2.7      74.2   283.8   39.1                                  350.0  37.3     2.5      72.6   311.4   47.4                                  375.0  40.5     2.3      70.8   340.7   57.1                                  400.0  43.9     1.9      68.9   372.2   68.6                                  425.0  47.4     1.2      66.9   406.4   82.4                                  450.0  51.3     0.4      64.5   444.0   99.4                                  475.0  55.4     -0.8     61.8   486.1   120.6                                 500.0  60.1     -2.6     58.6   534.4   148.2                                 ______________________________________                                    

EXAMPLE 22

In this example an optical lighting system comprising a mirror opticalsystem M was used in a projection system in which irradiance on asurface P to be irradiated was higher in the peripheral portion of thesurface P. The operating parameters and mirror data are shown in Table22 and a ray tracing view in accordance with this mirror optical systemM is shown in FIG. 34.

This example utilized an image-formation lens, the effective field angleof which is defined to be 45°, and was adapted to unify the irradianceof an image surface.

                  TABLE 22                                                        ______________________________________                                        A = 50 mm B = 800 mm f = 75 mm E = 72%                                        H              φ         R.sub.3      relative                            (mm)  θ (deg)                                                                          (deg)  α.sub.3 (deg)                                                                  (mm)  D.sub.3 (mm)                                                                         irradiated                          ______________________________________                                        25.0  4.2      1.5    88.6   3.7   0.0    1.00                                50.0  8.6      3.0    87.2   7.5   0.2    1.00                                75.0  12.9     4.5    85.8   11.3  0.4    1.01                                100.0 17.3     6.0    84.3   15.3  0.7    1.01                                125.0 21.7     7.5    82.8   19.4  1.2    1.02                                150.0 26.2     8.9    81.3   23.8  1.8    1.03                                175.0 30.9     10.4   79.7   28.3  2.5    1.04                                200.0 35.6     11.8   78.0   33.3  3.5    1.06                                225.0 40.5     13.1   76.3   38.6  4.7    1.07                                250.0 45.5     14.5   74.4   44.5  6.2    1.09                                275.0 50.7     15.7   72.5   51.1  8.2    1.15                                300.0 56.1     17.0   70.4   58.5  10.7   1.13                                325.0 61.8     18.1   68.1   67.2  14.0   1.15                                350.0 67.8     19.2   65.7   77.4  18.3   1.18                                375.0 74.1     20.1   63.0   90.0  24.4   1.20                                400.0 80.8     20.9   60.0   105.8 33.0   1.23                                425.0 88.1     21.5   56.7   126.8 45.9   1.27                                450.0 96.1     21.8   52.8   156.1 66.7   1.30                                475.0 104.9    21.4   48.2   200.7 103.5  1.34                                500.0 115.0    19.7   42.3   276.7 179.1  1.3                                 ______________________________________                                    

EXAMPLE 23

In this example an optical lighting system comprising a mirror opticalsystem M was used in a projection system in which irradiance on asurface P to be irradiated was higher in the peripheral portion of thesurface P, as was similar to example 22. Operating conditions and mirrordata are shown in Table 23 and a ray tracing view in accordance withthis mirror optical system M is shown in FIG. 35.

This example utilized an image-formation lens, the effective field angleof which was defined to unify the irradiance of an image surface.

The light source LS was formed by a surface light source which emitslight only toward the mirror M and was negligible in size.

                  TABLE 23                                                        ______________________________________                                        A = 50 mm B = 800 mm f = 150 mm E = 84%                                       H              φ         R.sub.3      relative                            (mm)  θ (deg)                                                                          (deg)  α.sub.3 (deg)                                                                  (mm)  D.sub.3 (mm)                                                                         irradiated                          ______________________________________                                        25.0  2.4      1.6    89.5   2.1   0.0    1.00                                50.0  4.9      3.2    89.1   4.3   0.0    1.00                                75.0  7.4      4.8    88.7   6.4   0.0    1.01                                100.0 9.9      6.5    88.2   8.7   0.1    1.02                                125.0 12.4     8.1    87.8   11.0  0.2    1.03                                150.0 15.0     9.6    87.3   13.3  0.3    1.04                                175.0 17.7     11.2   86.7   15.8  0.4    1.06                                200.0 20.4     12.7   86.1   18.4  0.5    1.08                                225.0 23.2     14.3   85.5   21.1  0.7    1.10                                250.0 26.2     15.7   84.7   24.1  1.0    1.12                                275.0 29.2     17.2   83.9   37.2  1.3    1.15                                300.0 32.5     18.6   83.0   30.7  1.7    1.18                                325.0 35.9     20.0   82.0   34.6  2.2    1.22                                350.0 39.5     21.3   80.8   38.9  2.0    1.26                                375.0 43.5     22.5   79.5   43.9  3.7    1.30                                400.0 47.8     23.7   77.9   49.7  4.9    1.34                                425.0 52.6     24.8   76.1   56.9  6.5    1.39                                450.0 58.2     25.8   73.7   66.2  9.0    1.44                                475.0 65.1     26.6   70.7   79.3  13.2   1.50                                500.0 75.0     27.0   65.9   102.7 22.6   1.56                                ______________________________________                                    

EXAMPLE 24

In this example an optical lighting system comprising a Fresnel mirrorFM was used in a contact or proximity exposure system in whichirradiance on a surface P to be irradiated was uniform all over thesurface P. Operating conditions and mirror data are shown in Table 24and a ray tracing view in accordance with this Fresnel mirror FM isshown in FIG. 36.

A light source LS was assumed to be formed by a point light source whichhas uniform radiant intensity J(θ).

                  TABLE 24                                                        ______________________________________                                        A = 150 mm B = 600 mm f = 2000 mm E = 40%                                     H (mm)    θ (deg)                                                                         φ (deg)                                                                              α.sub.3 (deg)                                                                  R.sub.3 (mm)                              ______________________________________                                        25        1.9     1.9        89.9   5.0                                       50        3.9     3.7        89.9   10.2                                      75        5.9     5.6        89.8   15.6                                      100       8.0     7.4        89.6   21.3                                      125       10.3    9.2        89.4   27.3                                      150       12.7    10.9       89.1   33.9                                      175       15.2    12.5       88.6   40.9                                      200       17.9    14.1       88.0   48.6                                      225       20.8    15.6       87.4   57.0                                      250       23.8    17.0       86.6   66.1                                      275       26.9    18.3       85.6   76.2                                      300       30.2    19.5       84.6   87.3                                      325       33.6    20.5       83.4   99.6                                      350       37.1    21.5       82.1   113.5                                     375       40.7    22.2       80.7   129.3                                     400       44.5    22.8       79.1   147.6                                     425       48.4    23.0       77.3   169.1                                     450       52.4    23.0       75.2   195.0                                     475       56.5    22.4       72.9   227.2                                     500       60.8    21.0       70.1   268.7                                     ______________________________________                                    

EXAMPLE 25

In this example an optical lighting system comprising a Fresnel mirrorFM was used in a contact or proximity exposure system in whichirradiance on a surface P to be irradiated was uniform all over thesurface P, as was similar to the twenty-fourth practical example.Operating parameters and mirror data are shown in Table 25 and a raytracing view in accordance with this Fresnel mirror FM is shown in FIG.37.

The light source LS was formed by a surface illuminant which emittedlight only toward the mirror M and was negligible in size.

                  TABLE 25                                                        ______________________________________                                        A = 100 mm B = 800 mm f = 220 mm E = 78%                                      H (mm)    θ (deg)                                                                         φ (deg)                                                                              α.sub.3 (deg)                                                                  R.sub.3 (mm)                              ______________________________________                                        25        2.6     1.4        89.3   4.6                                       50        5.3     2.9        88.7   9.3                                       75        8.0     4.3        88.1   14.1                                      100       10.7    5.7        87.5   18.9                                      125       13.4    7.1        86.8   23.9                                      150       16.2    8.5        86.1   29.1                                      175       19.0    9.9        85.4   34.5                                      200       21.8    11.2       84.7   40.1                                      225       24.8    12.5       83.8   46.2                                      250       27.7    13.8       83.0   52.6                                      275       30.8    15.0       82.1   59.7                                      300       34.0    16.2       81.0   67.4                                      325       37.2    17.2       79.9   76.1                                      350       40.7    18.2       78.7   86.1                                      375       44.3    19.1       77.3   97.7                                      400       48.2    19.8       75.7   111.9                                     425       52.4    20.2       73.9   129.8                                     450       57.0    20.2       71.6   154.1                                     475       62.3    19.5       68.6   190.6                                     500       68.7    16.8       64.0   257.5                                     ______________________________________                                    

EXAMPLE 26

In this example an optical lighting system comprising a Fresnel mirrorFM was used in a projection system in which irradiance on a surface P tobe irradiated was higher in the peripheral portion of the surface P.Operating parameters and mirror data are shown in Table 26 and a raytracing view in accordance with this Fresnel mirror FM is shown in FIG.38.

This example used an image-formation lens, the effective field angle ofwhich was assumed to be 45°, and was adapted to unify the irradiance ofan image surface.

A light source LS was formed by a point light source which is assumed tobe uniform in radiant intensity J(θ).

                  TABLE 26                                                        ______________________________________                                        A = 150 mm B = 600 mm f = 2000 mm E = 37%                                                                             relative                              H (mm) θ (deg)                                                                          φ (deg)                                                                            α.sub.3 (deg)                                                                  R.sub.3 (mm)                                                                          irradiated                            ______________________________________                                        25     2.4      1.3      89.4   6.4     1.00                                  50     4.9      2.6      88.8   13.0    1.01                                  75     7.4      3.9      88.2   19.6    1.01                                  100    10.0     5.2      87.6   26.5    1.02                                  125    12.6     6.5      86.9   33.6    1.03                                  150    15.2     7.7      86.2   41.0    1.05                                  175    18.0     8.9      85.4   48.8    1.06                                  200    20.8     10.1     84.6   57.1    1.08                                  225    23.7     11.2     83.7   66.1    1.10                                  250    26.8     12.2     82.7   75.8    1.13                                  275    29.9     13.2     81.6   86.5    1.16                                  300    33.2     14.1     80.4   98.3    1.19                                  325    36.6     14.9     79.1   111.6   1.22                                  350    40.2     15.5     77.6   126.7   1.26                                  375    43.9     16.0     76.0   144.4   1.30                                  400    47.7     16.3     74.2   165.4   1.35                                  425    51.8     16.3     72.2   191.0   1.39                                  450    56.1     15.8     69.8   223.4   1.45                                  475    60.6     14.6     66.9   266.4   1.50                                  500    65.3     12.2     63.4   326.9   1.56                                  ______________________________________                                    

EXAMPLE 27

In this example an optical lighting system comprising a Fresnel mirrorFM was used in a projection system in which irradiance on a surface P tobe irradiated was higher in the peripheral portion of the surface P. Theoperating parameters and mirror data are shown in Table 27 and a raytracing view in accordance with this Fresnel mirror FM is shown in FIG.39.

A light source LS was formed by a surface light source which emittedlight only toward the mirror M and was negligible in size.

                  TABLE 27                                                        ______________________________________                                        A = 100 mm B = 800 mm f = 260 mm E = 82%                                                                              relative                              H (mm) θ (deg)                                                                          φ (deg)                                                                            α.sub.3 (deg)                                                                  R.sub.3 (mm)                                                                          irradiated                            ______________________________________                                        25     2.4      1.4      89.5   4.2     1.00                                  50     4.8      2.9      89.0   8.4     1.00                                  75     7.2      4.4      88.5   12.8    1.01                                  100    9.7      5.9      88.0   17.2    1.01                                  125    12.2     7.3      87.5   21.7    1.03                                  150    14.8     8.7      86.9   26.4    1.04                                  175    17.4     10.1     86.3   31.4    1.06                                  200    20.1     11.5     85.6   36.6    1.08                                  225    22.9     12.8     84.9   42.2    1.10                                  250    25.8     14.1     84.1   48.3    1.12                                  275    28.8     15.3     83.2   55.0    1.15                                  300    31.9     16.5     82.2   62.4    1.18                                  325    35.3     17.6     81.1   70.8    1.22                                  350    38.8     18.6     79.8   80.5    1.26                                  375    42.6     19.4     78.3   92.2    1.30                                  400    46.8     20.1     76.6   106.8   1.34                                  425    51.5     20.4     74.4   125.9   1.39                                  450    56.9     20.3     71.7   153.4   1.44                                  475    63.3     19.0     67.8   199.4   1.50                                  500    72.1     13.3     60.6   309.7   1.56                                  ______________________________________                                    

Although the above Examples 1-18 have been described with respect to alens optical system which has a spherical incidence plane surface, theplane of incidence may be an aspheric surface as is similar to theoutgoing plane F₂ of the lens optical system.

Further, the light source LS may be a secondary light source formed byconverging means such as another reflecting mirror.

Although the present invention has been described and illustrated inconnection with preferred embodiments thereof, many other variations andmodifications will now become apparent to those skilled in the artwithout departing from the scope of the invention. It is preferredtherefore that the present invention be limited not by the specificdisclosure herein, but only by the appended claims.

WHAT IS CLAIMED IS:
 1. An optical lighting system for radiating lightemitted from a light source to a surface, comprising:an optical lensassociated with a longitudinal optical axis for radiating the light fromthe light source, the optical lens having an incident light plane and anexisting light plane; the incident light plane and exiting light planebeing oriented with respect to the longitudinal optical axis; theorientation of the incident light plane and exiting light plane beingeffective to produce irradiance on the surface at a point H defined byS(H), and being so that a light ray proceeding from the light source tothe incident light plane makes an angle θ with the longitudinal opticalaxis such that the relationship between S(H) and θ is defined by:

    ∫S(H)HdH=∫J(θ) sin θdθ

and an angle α₁ made by the incident light plane and the optical axis,is defined by:

    tan α.sub.1 =(-n cos θ.sub.1 =cos θ)/(n sin θ.sub.1 -sin θ)

and an angle α₂, which is the angle made by the exiting light plane andthe longitudinal optical axis, is defined by:

    tan α.sub.2 =(-n cos θ.sub.1 +cos θ)/(n sin θ.sub.1, -sin φ)

wherein, J(θ) is the radiant intensity of the light source, n is therefractive index of the optical lens system, θ₁ is an angle which alight ray proceeding through the optical lens makes with thelongitudinal optical axis, and φ is an angle a ray proceeding from theexiting plane to the surface makes with the longitudinal optical axis.2. An optical lighting system as claimed in claim 1, wherein the opticallens comprises a Fresnel lens, the incident light plane comprises a flatincident light plane and the exiting light plane comprises a pluralityof concentric Fresnel optical surfaces, the angle α₂ which the pluralityof Fresnel optical surfaces make with the optical axis being defined by:##EQU6##